Hexamethyldisiloxane (HMDSO), a linear polydisiloxane, is an organosilicon reagent commonly utilized as a source for plasma enhanced chemical vapor deposition (PE-CVD) of thin films of silicon compounds. It is also employed as a substitute to silane in silicon integrated circuit technology.
Chemical Name: Hexamethyldisiloxane
CAS No.: 107-46-0
Molecular Fomula:C6H18OSi2
Molecular weight: 162.38
Appearance: Colorless transparant liquid
Hexamethyldisiloxane Typical Properties
| Items | Specifications |
| Specific Gravity | 0.7600-0.7700g/cm3 |
| Refractive Index(n25D) | 1.3746-1.3750 |
| Melting Point |
-59 °C(lit.) |
| Boiling Point | 101 °C(lit.) |
| Fp | 33 °F |
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