Research on the development and analysis technology of high performance tantalum pentachloride for tantalum carbide coating

1. Characterization of tantalum pentachloride:
Appearance: (1) Color
The whiteness index of tantalum pentachloride powder is generally above 75. The local appearance of yellow particles is caused by the extreme coldness of tantalum pentachloride after being heated, and does not affect its use.

(2) Particle size: particle shape, particle size, rod-shaped, rod-shaped, irregular shape. The laser particle size analyzer is being improved to test the particle size of the powder; the sieving method is used to determine the particle size distribution; existing specifications: 20-60 mesh, below 60 mesh ;Adjust the process to achieve spherical powder as much as possible.

(3) Fluidity: The smaller the angle of repose, powder flow rate, degree of compression, and bulk specific gravity, the smaller the angle of repose (less than 30°), the better the fluidity of the powder; the smaller the degree of compression, the larger the bulk ratio, and the better the fluidity of the powder. good.

Ingredients: (1) TaCl5 (Q/HNHJ013-2020) Tantalum pentachloride reacts with ethanol and water, dried and burned to form tantalum pentoxide, which is weighed and converted into Ta content in tantalum pentachloride.

The Ta content in palladium pentachloride is calculated as mass fraction oTa according to formula (A.1):

In formula (A.1): m1——mass of palladium pentoxide and cyanide, in grams (g):
m2-mass of crucible, in grams (g):
m -mass of weighed sample, in grams (g):
0.81897——mass fraction of Ta content in palladium pentoxide.

(2) TaCl5, TaCl3O TG analysis

(3) Gold impurity analysis ICP-OES/MS, GD-MS The current specifications of tantalum pentachloride: 3N5: 20MT/a; 4N5: 50kg/m; Nb＜200ppb: 50kg/m
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